Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have measured the mode frequency amd linewidth of the Ag(B1g) phonon mode which exhibits softening below the superconducting transition in the YBa2Cu3O7 (Y123) family of high temperature superconductors. Measurements were made on Y123, Eu123 and on non-superconducting Pr123. The mode softens by 10 cm-1 in Y123, by 3 cm-1 in Eu123 and shows no anomaly in Pr123. © 1989.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Proceedings of SPIE 1989
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