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Modeling polarization for Hyper-NA lithography tools and masks
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Paper
A simple bearing for horizontal rotation of heavy equipment in UHV
Abstract
Three metal carbide spheres located approximately equidistant on a support with a V-shaped circular groove allow easy horizontal rotation of a heavy mass in UHV via a turntable residing on the three spheres with vertical axis in the center of the support. © 1984, American Vacuum Society. All rights reserved.
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