S. Guha, E. Gusev, et al.
Applied Physics Letters
It is well known that chemical etching of strontium titanate (SrTiO3) results in titanium-terminated (B site) surfaces. In this letter, we describe a facile method for generating strontium-terminated surfaces in SrTiO3. We demonstrate that a substrate treatment consisting of a low-power oxygen ashing followed by annealing yields a strontium (A site)-terminated surface in single-crystal SrTiO3 (100). This surface termination of the substrate allows the deposition of cuprate films with improved quality. © 2001 American Institute of Physics.
S. Guha, E. Gusev, et al.
Applied Physics Letters
V. Narayanan, V.K. Paruchuri, et al.
VLSI Technology 2006
F.-J. Meyer Zu Heringdorf, D. Kähler, et al.
Surface Review and Letters
A.G. Schrott, J. Misewich, et al.
MRS Proceedings 2002