A Smart Sensor System for Carbon Monoxide Detection

This paper illustrates a smart sensor system for carbon monoxide detection. An innovative technological approach has been pursued to fabricate gas sensors on silicon substrate, compatible with IC fabrication. A mixed analog-digital electronic interface processes the outputs of three sensors to compensate relative humidity and interfering gases. Sigma-delta signal processing and low-frequency noise reduction techniques are used to minimize silicon area and to meet the required performance in a standard CMOS technology.