Suraj J. Mathew, Guofu Niu, et al.
IEEE Electron Device Letters
We report absolute removal rate constants for silylene by reaction with alkanes, olefins, 1,3-butadiene, and acetylene at ambient temperature and 5-Torr total pressure. Rate constants were determined by laser resonance absorption flash kinetic spectroscopy. The results show that silylene is unreactive with alkanes and reacts rapidly and unselectively with unsaturated hydrocarbons. © 1987 American Chemical Society.
Suraj J. Mathew, Guofu Niu, et al.
IEEE Electron Device Letters
Huiling Shang, Martin M. Frank, et al.
IBM J. Res. Dev
Joseph M. Jasinski
Journal of Physical Chemistry
Hulling Shang, Jack O. Chu, et al.
IEDM 2004