PaperSequential Lateral Solidification of Silicon Thin Films on Cu BEOL-Integrated Wafers for Monolithic 3-D IntegrationFabio Carta, Stephen M. Gates, et al.IEEE T-ED
PaperMass spectrometric studies of remote helium plasma dissociation of silaneJoseph M. JasinskiJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperIn Situ Determination of the Effects of CO2 and Other Volatile Impurities on YBa2Cu3O7_xC. Michael Greenlief, Joseph F. Bringley, et al.Chemistry of Materials
PaperSurface chemistry in the chemical vapor deposition of electronic materialsStephen M. GatesChemical Reviews
