Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
A detailed analysis is reported of the chemical and physical modifications which occur to PTFE surfaces exposed to glow discharges in ammonia gas and in air. The analytical methods used were infra-red attenuated total reflectance and differential attenuated total reflectance spectroscopy, X-ray photoelectron spectroscopy, contact angle measurements and scanning electron microscopy. The suitability for bonding with adhesives and the stability of the modified surfaces to attack by oxidizing acids are also reported. © 1973.
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
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IEDM 1998
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Microelectronic Engineering