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SPIE Advanced Lithography 2010
We have observed an anomalous coverage dependence of sputtered Cs+ and Li+ yields from Cs and Li overlayers on Si(111) surfaces. The ion yield reaches a maximum and decreases at higher coverages even when the coverage is still less than a monolayer. We found that this phenomenon is directly related to the effect of the work function on the ionization probability. © 1984 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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Physica B: Physics of Condensed Matter
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