PaperCalculation of changes in pattern dimensions to compensate for proximity effects in electron lithographyMihir ParikhJournal of Applied Physics
PaperCorrections to proximity effects in electron beam lithography. I. TheoryMihir ParikhJournal of Applied Physics
PaperEnergetic electron degradation spectra and initial yields in argonMihir ParikhThe Journal of Chemical Physics
PaperCorrections to proximity effects in electron beam lithography. II. ImplementationMihir ParikhJournal of Applied Physics