A tunneling spectroscopy study of molecular degradation due to electron irradiation
- Paul K. Hansma
- Mihir Parikh
- 1975
- Science
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12 results for Mihir Parikh
Applicability of the Fano plot to secondary electron (SE) yield data
- Mihir Parikh
- Ryuichi Shimizu
- 2008
- Applied Physics Letters
Corrections to proximity effects in electron beam lithograhy. III. Experiments
- Mihir Parikh
- 2008
- Journal of Applied Physics
Energy deposition functions in electron resist films on substrates
- Mihir Parikh
- David F. Kyser
- 2008
- Journal of Applied Physics
Corrections to proximity effects in electron beam lithography. II. Implementation
- Mihir Parikh
- 2008
- Journal of Applied Physics
Corrections to proximity effects in electron beam lithography. I. Theory
- Mihir Parikh
- 2008
- Journal of Applied Physics
Energetic electron degradation spectra and initial yields in argon
- Mihir Parikh
- 2008
- The Journal of Chemical Physics
Calculation of changes in pattern dimensions to compensate for proximity effects in electron lithography
- Mihir Parikh
- 2008
- Journal of Applied Physics
Dependence of pattern dimensions on proximity functions in electron beam lithography
- Mihir Parikh
- 2008
- Journal of Applied Physics
Electron beam damage of chemisorbed surface species: A tunneling spectroscopy study
- James T. Hall
- Paul K. Hansma
- et al.
- 1977
- Surface Science