T. Schneider, E. Stoll
Physical Review B
No abstract available.
T. Schneider, E. Stoll
Physical Review B
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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SPIE Advanced Lithography 2010