Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Paper

03 Nov 2003

Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing

View publication

Abstract

No abstract available.

Related

Talk

Tuning single-atom electron spin resonance in a vector-magnetic field

Talk

Magnetic sensing and control using single-atom spin resonance in an STM

Paper

Monitoring Solid-Phase Reactions in Self-Assembled Monolayers by Surface-Enhanced Raman Spectroscopy

Talk

Probing resonating valence bond states in artificial quantum magnets using scanning tunneling microscopy

View all publications