Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A formulation is given which permits the rapid mechanical computation of the three radial distribution functions gij(r) of a binary hard-sphere mixture to any distance r, in the Percus-Yevick (P-Y) approximation. The consistency of the P-Y equation of state obtained by various methods is discussed. © 1971 Taylor & Francis Group, LLC.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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