Frank Stem
C R C Critical Reviews in Solid State Sciences
We compared three chemical solution deposition routes to BaxSr1-xTiO3 (BST) films. A metal organic decomposition (MOD) solution composed of barium and strontium acetate, titanium diisopropoxide bis(acetylacetonate), dissolved in a mixture of acetic acid, water and isoproponal resulted in films with spin defects, pinholes, poor crystallization, and poor electrical properties. FTIR spectra revealed a less facile decomposition pathway as indicated by the larger thermal budget required to decompose the titanium precursor, a reduced hydroxy component and increased free CO2. A hybrid route utilizing acetic acid modified barium, strontium and titanium isopropoxides resulted in films with better crystallinity and a reduced carbonate content in the FTIR spectra. The best BST films were obtained from a sol gel route utilizing barium, strontium and titanium 2-methoxyethoxides. The films had minimal carbonate content in the FTIR spectra, crystallized at 700 °C, and had dielectric constants up to 400 with leakage currents less than 10-7 A/cm2.
Frank Stem
C R C Critical Reviews in Solid State Sciences
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
T.N. Morgan
Semiconductor Science and Technology