Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
A process for the fabrication of mirror facets for AlGaAs/GaAs laser diodes is described. The major requirements for the fabrication of high quality mirrors have been fulfilled by using Cl2/Ar chemically assisted ion beam etching (CAIBE) and a new multilayer mask structure that produces the smoothest facets. The fabricated AlGaAs/GaAs SQW-GRIN-SCH lasers with etched mirrors show characteristics similar to those of lasers with cleaved mirrors on the same substrate. Results of on-wafer testing of laser threshold uniformity by means of monitor diodes indicate the potential of the process for laser integration and full wafer fabrication and testing. © 1989.
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
P.C. Pattnaik, D.M. Newns
Physical Review B
David B. Mitzi
Journal of Materials Chemistry
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter