Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
T. Graham, A. Afzali, et al.
Microlithography 2000
Salvatore Certo, Anh Pham, et al.
Quantum Machine Intelligence