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SPIE Advanced Lithography 2010
We show that the atomic force formula of Yu, Singh, and Krakauer [Phys. Rev. B 43, 6411 (1991)] for the linearized-augmented-plane-wave method is equivalent to that previously found by us. In particular, a kinetic muffin-tin-surface contribution described by Yu, Singh, and Krakauer is shown to be also included in our formula. © 1993 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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