Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Finding a natural meeting ground between the highly developed complexity theory of computer science - with its historical roots in logic and the discrete mathematics of the integers - and the traditional domain of real computation, the more eclectic less foundational field of numerical analysis - with its rich history and longstanding traditions in the continuous mathematics of analysis - presents a compelling challenge. Here we illustrate the issues and pose our perspective toward resolution.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996