Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
Let P be (the boundary of) a simple polygon with n vertices. For a vertex p of P, let φ{symbol}(p) be the set of points on P that are farthest from p, where the distance between two points is the length of the (Euclidean) shortest path that connects them without intersecting the interior of P. In this paper, we present an O(n log n) algorithm to compute a member of φ{symbol}(p) for every vertex p of P. As a corollary, the external diameter of P can also be computed in the same time. © 1991.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
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SPIE Photomask Technology + EUV Lithography 2009
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