Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
K.A. Chao
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010