C.T. Chuang, B.S. Wu, et al.
IEEE Journal of Solid-State Circuits
Piezoelectric coupling with an interdigital transducer (IDT) to plate modes in a composite ZnO–SiO2–Si membrane that is thinner than an acoustic wavelength has been examined for possible use in forming on-chip filters or resonators. Tests at 80 MHz on a composite membrane approximately 45 μm thick with IDT's having a 76 μm period indicates preferential coupling to the lowest quasi-symmetric plate wave having a phase velocity roughly 60% higher than that of the ordinary surface-acoustic-wave (SAW) on the un-thinned portion of the same silicon wafer. Results are presented for a resonator made on such a structure in which end reflectors are single slots etched in the membrane. Numerical calculations confirm the observation and reveal that the electromechanical coupling coefficient is 1.4% as compared with 0.1% for ordinary SAW's on semi-infinite substrate. Copyright © 1983 by The Institute of Electrical and Electronics Engineers, Inc.
C.T. Chuang, B.S. Wu, et al.
IEEE Journal of Solid-State Circuits
C.T. Chuang
International Symposium on VLSI Technology, Systems, and Applications, Proceedings
R.V. Joshi, W. Hwang, et al.
International Symposium on VLSI Technology, Systems, and Applications, Proceedings
Rajiv V. Joshi, Richard Q. Williams, et al.
ESSDERC/ESSCIRC 2004