Conference paper
Various Properties of sputtered TaxAlt-x films
V.J. Minkiewicz, J.O. Moore, et al.
MRS Fall Meeting 1993
Paper
Cross-sectioning of layered thin films by ultramicrotomy
Abstract
Ultramicrotomy is shown to be a valuable technique for observing thin films in cross-section. The structure of layered Co-Tb and Mo-Ge films are characterized, with layers as thin as 0.9 nm resolved in the latter. © 1986.
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