Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report measurements of the optic index of refraction as a function of temperature, n (T), in the crystalline ferroelectrics having the simple perovskite (ABO3) structure. We show that these crystals possess a local, randomly oriented, nonreversible polarization below a temperature Td several hundred degrees above the ferroelectric phase-transition temperature Tc. Using a simple model, we account for this behavior and understand quantitatively the values of Td. This model, we believe, contains the basic physical understanding of ferroelectrics with a diffuse phase transition. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications