J.M. Jasinski, F.K. LeGoues
Chemistry of Materials
The reactive species SiH2 has been directly observed in dc glow discharges using the technique of frequency modulation absorption spectroscopy. The spatial distribution of SiH2 in the discharge and the relative amounts of SiH2 in silane and disilane discharges have been measured.
J.M. Jasinski, F.K. LeGoues
Chemistry of Materials
W.E. Moerner, C.P. Walsh, et al.
SPIE San Diego 1991
M. Gehrtz, G.C. Bjorklund
Journal of Molecular Structure
R.M. Shelby, R.M. Macfarlane, et al.
Applied Physics B Photophysics and Laser Chemistry