Role of gas phase reactions in silicon chemical vapor deposition from monosilane
- B.A. Scott
- R.D. Estes
- 1989
- Applied Physics Letters
Publications
5 results for R.D. Estes
Absolute rate constants for silylene reactions with diatomic molecules
- J.O. Chu
- D.B. Beach
- et al.
- 1988
- Chemical Physics Letters
The role of surface reactions in monosilane pyrolysis
- B.A. Scott
- R.D. Estes
- et al.
- 1988
- The Journal of Chemical Physics
Laser powered homogeneous pyrolysis of silane
- J.M. Jasinski
- R.D. Estes
- 1985
- Chemical Physics Letters
Detection of SiH2 in silane and disilane glow discharges by frequency modulation absorption spectroscopy
- J.M. Jasinski
- E.A. Whittaker
- et al.
- 1984
- Applied Physics Letters