William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
We show, using a rate equation approach, that 1 + 1′ resonance-enhanced multiphoton ionization (REMPI) of D2 can be treated as a single-photon process in the limit of high ionization laser power and that unambiguous alignment information can be obtained in this limit. We illustrate the discussion using a case study of the detection D2 via the B1Σ+u ← X1Σ+g transition and apply the methodology to obtain alignment information for D2 (v = 0, J = 11) desorbed from Cu(111). © 1999 Elsevier Science B.V. All rights reserved.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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