Conference paper
A multilevel copper/low-k/airgap BEOL technology
S.V. Nitta, S. Ponoth, et al.
ADMETA 2007
Tensile testing of materials that freeze at subambient temperatures usually requires casting of the material in a mold, transferring the cast specimen into precooled test fixtures held in a moisture-free environment to avoid frosting, followed by performing the test at the desired cryogenic temperature. In this report we describe a device that allows the casting as well as testing to be completed in one assembly and cool-down cycle, eliminating the cumbersome intermediate steps.
S.V. Nitta, S. Ponoth, et al.
ADMETA 2007
C. Narayan, S. Purushothaman, et al.
IEEE Transactions on Components Packaging and Manufacturing Technology Part B
M. Colburn, S.V. Nitta, et al.
AMC 2003
K.N. Chen, C. Tsang, et al.
VMIC 2006