Daniel Krebs, Simone Raoux, et al.
Applied Physics Letters
In order to correct errors in a previously published work on a treatment of two-dimensional coupled-wave theory, a complete derivation of the two-dimensional ‘overlap grating’ coupled wave equations is given. By using the Riemann method, a corrected solution to the equations in closed mathematical form is obtained. On the basis of this solution a brief investigation of the diffraction properties of finite-sized gratings, and in particular the dependence of diffraction efficiency on the geometric size of gratings, is given. © 2004 Taylor & Francis Group, LLC.
Daniel Krebs, Simone Raoux, et al.
Applied Physics Letters
Kohji Hosokawa, Pritish Narayanan, et al.
ISCAS 2021
Irem Boybat, Carmelo Di Nolfo, et al.
ICRC 2017
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009