Pritish Narayanan, Geoffrey W. Burr, et al.
IEEE J-EDS
In order to correct errors in a previously published work on a treatment of two-dimensional coupled-wave theory, a complete derivation of the two-dimensional ‘overlap grating’ coupled wave equations is given. By using the Riemann method, a corrected solution to the equations in closed mathematical form is obtained. On the basis of this solution a brief investigation of the diffraction properties of finite-sized gratings, and in particular the dependence of diffraction efficiency on the geometric size of gratings, is given. © 2004 Taylor & Francis Group, LLC.
Pritish Narayanan, Geoffrey W. Burr, et al.
IEEE J-EDS
Daniel Krebs, Simone Raoux, et al.
Journal of Applied Physics
Fai H. Mok, Geoffrey W. Burr, et al.
Optics Letters
Geoffrey W. Burr, Edmond Chow, et al.
NPIS 2005