Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using the Monte-Carlo technique we studied the isotropic layered xy-model. We concentrate on the fall of the transition temperature Tc, the behavior of the specific heat and the vortex density with reduced thickness. Our approximate Ginzburg-Landau treatment suggests that the drop of Tc resulting from the dimensional crossover is a combination of fluctuation and boundary effects. © 1992 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ronald Troutman
Synthetic Metals
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
K.N. Tu
Materials Science and Engineering: A