Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Smeared transitions into low-T domain states are evidenced by linear birefringence measured on Srl-xCaxTiO3 at all concentrations, ˂0.002˂x˂0.058. Sharp E vs T peaks, as observed for x 0.016, may be explained by domains having nearly sample size. The local disorder due t o the Ca2+-induced random fields may pa rtially be removed by a uniform external electric field. © 1988, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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