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SPIE Advanced Lithography 2008
Secondary grain growth in vapor-deposited Al-Cu thin films has been investigated as a function of temperature, Cu concentration and distribution. Second phase Al2Cu particles were found to have a considerable effect in retarding secondary growth. Nuclei for secondary growth formed, presumably by rearrangement of misfit dislocations, only when Cu was introduced as a layer sandwiched between two equal Al layers. © 1972.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
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Advanced Materials
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