Publication
Microelectronic Engineering
Paper

Early operating experience with the helios compact synchrotron x-ray source

View publication

Abstract

The Helios compact synchrotron installed at IBM's Advanced Lithography Facility provides a unique opportunity to obtain compact synchrotron reliability data in an industrial environment. This paper presents data from the first eight months of user oriented operation of the machine. Running and uptime statistics are tabulated, as well as achieved performance parameters. Unscheduled downtime in the various subsystems is described. © 1993.

Date

Publication

Microelectronic Engineering

Authors

Topics

Share