William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Low temperature diffusion of Cr and Si through thin gold films is studied in N2 and in (N2 + CO) ambients. The out-diffusion of both Cr and Si to the gold surface is suppressed in the presence of CO. The results are discussed in terms of a model which considers the roles of both the gold film and the ambients used. © 1980, The Electrochemical Society, Inc. All rights reserved.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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