J.W. Coburn
Thin Solid Films
Paper
Effect of ion bombardment on the plasma-assisted etching and deposition of plasma perfluoropolymer thin films
Abstract
A study of the etching and deposition of plasma perfluoropolymer thin films has been carried out by using quartz-crystal microbalance methods for a range of feed gas mixtures.
Related
Paper
Pattern transfer
J.W. Coburn
Superlattices and Microstructures
V.J. Minkiewicz, M. Chen, et al.
Applied Physics Letters
H.F. Winters, J.W. Coburn
Applied Physics Letters