Conference paper
PLASMA POTENTIALS IN rf GLOW DISCHARGES.
J.W. Coburn, K. Koehler
Symposium on Plasma Processing 1986
A study of the etching and deposition of plasma perfluoropolymer thin films has been carried out by using quartz-crystal microbalance methods for a range of feed gas mixtures.
J.W. Coburn, K. Koehler
Symposium on Plasma Processing 1986
Harold F. Winters, J.W. Coburn, et al.
JVSTA
J.W. Coburn, E. Taglauer, et al.
Japanese Journal of Applied Physics
Harold F. Winters, J.W. Coburn, et al.
Journal of Applied Physics