Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000