R. Ludeke, H.J. Wen
Microelectronic Engineering
We have grown n+ -GaAs films using Sn or Ge doping on n + -GaAs substrates by molecular beam epitaxy and studied the vertical electronic transport through the film-substrate interface. An interfacial layer with high resistance and a nonlinear I-V characteristic is observed whenever the substrates have been sputter-cleaned and annealed prior to the growth. Similar results are observed for the nonsputtered substrates with a high surface coverage of carbon. Such an interfacial layer can be eliminated in both cases by a predeposition of a Sn monolayer prior to the growth of the n+ -GaAs layers.
R. Ludeke, H.J. Wen
Microelectronic Engineering
R. Ludeke
Surface Science
Chin-An Chang
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Chin-An Chang, C.C. Tsuei, et al.
Applied Physics Letters