U. Gerlach-Meyer, J.W. Coburn, et al.
Journal of Applied Physics
A large variety of granular polymer thin films can be synthetized in a capacitively coupled coplanar diode radiofrequency (r.f.) discharge system in which an argon-monomer mixture is injected at low pressure (20 mTorr). This approach offers several advantages over the other techniques, e.g. easy control of the metal content in the film from a few % up to 100%. The d.c. electrical properties of gold containing plasma polymerized tetrafluoroethylene (PPTFE) and the magnetic behavior of cobalt containing plasma polymerized propane (PPP) are reported in this paper. © 1989 Springer-Verlag.
U. Gerlach-Meyer, J.W. Coburn, et al.
Journal of Applied Physics
P. Ziemann, E. Kay
JVSTA
U. Gerlach-Meyer, J.W. Coburn, et al.
Surface Science
P.B. Comita, W. Jacob, et al.
SPIE Microelectronic Processing Integration 1992