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- 1989
- Physical Review Letters
- 1988
- Physical Review Letters
- P.B. Comita
- W. Jacob
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- 1992
- SPIE Microelectronic Processing Integration 1992
- 1991
- Journal of Applied Physics
- 1985
- NATO Advanced Study Institute 1985
- J.W. Coburn
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- 2014
- Japanese Journal of Applied Physics