Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Thin dielectric films produced by electron bombardment of epichlorohydrin vapor were investigated with regard to their electrical characteristics and the effects of various parameters involved in their formation. The films showed non-ohmic conduction upon application of large electric fields. The nature of this conduction is considered and it is concluded that tunneling and electron emission are both involved, with the latter predominating at room temperature. © 1968.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007