Conference paper
A multilevel copper/low-k/airgap BEOL technology
S.V. Nitta, S. Ponoth, et al.
ADMETA 2007
A model is constructed where a nonequilibrium vacancy concentration resulting from electromigration-induced mass flux divergences is responsible for damage in the form of wedge-like and/or crack-like voids as well as thinning of extended areas. The damage morphology is primarily a function of temperature.
S.V. Nitta, S. Ponoth, et al.
ADMETA 2007
B. Özyilmaz, A.D. Kent, et al.
Physical Review Letters
G. Grinstein, R.H. Koch
Physical Review B - CMMP
S. Kumar, R. Matthews, et al.
Applied Physics Letters