J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Polyperfluorinated propylene oxides, -(CF(CF3)-CF2O-)n-, where n = 4, 8 and 50, are exposed to electron beams and their subsequent degradation monitored via infrared spectroscopy at T = 11 and 298 K. COF2, CF4, and R-CFO are produced and their G values are reported as a function of n, the number of monomer units, in the polymer. The G values range from 0.1 to 3, depending upon the gas product and n. The efficiency for gas evolution decreases with increasing number of monomer units. For n = 4, R-CFO, CF4 and COF2 are produced with G values of 3.0, 2.7, and 2.4, respectively. As n increases to 50, COF2 becomes the dominant product with a G value of 1.0, followed by CF4 at 0.7, and R-CFO at 0.1.
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids