R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
As a continued effort to improve the performance of low energy scanning electron probe systems for application in microscopy, lithography, metrology, etc., miniaturized electron beam columns, approximately 3 mm in length, demonstrating a probe size of 10 nm with a beam current of ≥ 1 n A at 1 keV, have been successfully developed. This paper presents current status, future directions and potential applications of these microcolumns.
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
David B. Mitzi
Journal of Materials Chemistry