Eloisa Bentivegna
Big Data 2022
As a continued effort to improve the performance of low energy scanning electron probe systems for application in microscopy, lithography, metrology, etc., miniaturized electron beam columns, approximately 3 mm in length, demonstrating a probe size of 10 nm with a beam current of ≥ 1 n A at 1 keV, have been successfully developed. This paper presents current status, future directions and potential applications of these microcolumns.
Eloisa Bentivegna
Big Data 2022
Ming L. Yu
Physical Review B
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry