F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
As a continued effort to improve the performance of low energy scanning electron probe systems for application in microscopy, lithography, metrology, etc., miniaturized electron beam columns, approximately 3 mm in length, demonstrating a probe size of 10 nm with a beam current of ≥ 1 n A at 1 keV, have been successfully developed. This paper presents current status, future directions and potential applications of these microcolumns.
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
Robert W. Keyes
Physical Review B
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules