Conference paper
LPCVD TUNGSTEN SILICIDE WITH TITANIUM UNDERLAYER.
R.V. Joshi, L. Krusin-Elbaum, et al.
VLSI Technology 1985
No abstract available.
R.V. Joshi, L. Krusin-Elbaum, et al.
VLSI Technology 1985
P.J. Grundy, S.R. Herd
physica status solidi (a)
S.R. Herd, K.Y. Ahn, et al.
Journal of Applied Physics
S.R. Herd, P. Chaudhari
Journal of Applied Physics