William Krakow, David A. Smith
Ultramicroscopy
The demands of ULSI in the sub-micron regime require the understanding of properties and control of microstructure in a situation where one or more of the characteristic dimensions of the sample is of the same order as the grain size of the material. Grain structure, as determined by deposition conditions, sample geometry and thermal treatment during processing, remains the first-order microstructural factor governing the ptoperties. The grain structure evolves during both deposition and processing. A major practical and scientific issue is the elucidation of the conditions which will result in a stable grain structure. This happens when the forces acting on the grain boundaries are in equilibrium. © 1993.
William Krakow, David A. Smith
Ultramicroscopy
Judith G. Ulan, Wilhelm F. Maier, et al.
Journal of Organic Chemistry
Detlev A. Grützmacher, Thomas O. Sedgwick, et al.
SPIE Physical Concepts of Materials for Novel Optoelectronic Device Applications 1993
David A. Smith, Gary Shiflet
Materials Science and Engineering