Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The energetics of the weakly incommensurate phase of a quasi-two- dimensional system of 20 736 krypton atoms on a graphite surface are investigated. We have chosen a krypton-graphite potential which gives the commensurate phase as the lowest-energy state. The energy increase of the incommensurate phase can be described in terms of a hexagonal domain-wall network confirming the phenomenologic description of Bak et al. The wall energy per unit length and the energy associated with each wall intersection are calculated. Since (/kB-30 K) is significantly negative our results provide strong evidence that the commensurate-incommensurate transition might be first order. © 1985 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS