William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The oxidation of Si(100) surfaces covered with 3 AÌScaron; Ce was studied by high-resolution photoemission spectroscopy. The oxygen uptake was found to be enhanced by orders of magnitude by the presence of Ce. Because of chemical reaction between Ce and Si, a mixed oxide with a Ce:Si composition ratio of 1:1:3 is formed. The sharp photoemission spectra of this oxide indicate the formation of a well-defined compound in which both Ce and Si are in a 3+ oxidation state. © 1986 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
David B. Mitzi
Journal of Materials Chemistry
T.N. Morgan
Semiconductor Science and Technology
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology