M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Results are presented detailing the crystallographic quality of a number of metal films deposited by epitaxial sputter deposition. Such films have single-orientation f.c.c., h.c.p., b.c.c. and hybrid crystal structures, and include the elements Ag, Au, Co, Cr, Cu, Fe, Rh, Ru, Pd and V. The crystal structure was characterized using X-ray diffraction analysis.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992