Robert W. Keyes
Physical Review B
Results are presented detailing the crystallographic quality of a number of metal films deposited by epitaxial sputter deposition. Such films have single-orientation f.c.c., h.c.p., b.c.c. and hybrid crystal structures, and include the elements Ag, Au, Co, Cr, Cu, Fe, Rh, Ru, Pd and V. The crystal structure was characterized using X-ray diffraction analysis.
Robert W. Keyes
Physical Review B
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Ellen J. Yoffa, David Adler
Physical Review B