Conference paper
Post-Si CMOS: III-V n-MOSFETs with high-k gate dielectrics
Yanning Sun, S.J. Koester, et al.
CS MANTECH 2007
In this paper, the critical role played by various types of defects and strain relaxation mechanisms in high-Tc thin films is highlighted and illustrated with examples. The defects are essential for providing adequate diffusion channels for oxygen ingress during the cooling step in c-axis thin films. The operation of strain relaxation mechanisms necessitated by the lattice mismatch between film and substrate can impose a compressive or tensile biaxial pressure, which either increases or reduces the critical temperature.
Yanning Sun, S.J. Koester, et al.
CS MANTECH 2007
G.J. Norga, C. Marchiori, et al.
Journal of Applied Physics
C. Rossel, M. Sousa, et al.
Microelectronic Engineering
J.W. Seo, J. Fompeyrine, et al.
Applied Physics Letters