Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We prove some results related to the question of the existence of factor maps and eventual factor maps between shifts of finite type. Our main result is that if A and B are integral eventually positive (IEP) matrices, and A eventually factors finite-to-one onto B, then there exists an IEP matrix C such that A eventually factors onto C by left closing maps and C eventually factors onto B by right closing maps. This answers the question of the existence of finite-to-one eventual factor maps when the spectrum of A is simple. As a corollary, if in addition to the above hypothesis, χA=χB, (where χA is the characteristic polynomial of A modulo x), then A is shift equivalent to B. © 1991, Cambridge University Press. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998