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PaperAdaptive solution strategy for solving large systems of p‐type finite element equationsR.B. Morris, Y. Tsuji, et al.International Journal for Numerical Methods in Engineering
Conference paperTotal Source Mask Optimization: High-capacity, resist modeling, and production-ready mask solutionMoutaz Fakhry, Yuri Granik, et al.SPIE Photomask Technology + EUV Lithography 2011
